Spectroscopic Ellipsometry. Spectroscopic Ellipsometry and Analysis of the Measured Data.

Spectroscopic ellipsometry study

The dielectric functions of InP, IIla.53 Gao.47 As, and 1110.75 Gao.2S Aso.s P 0.5 epitaxial layers have been measured using a polarization-modulation spectroscopic ellipsometer in the 1.5 to 5.3 eV region. The oxide removal procedure has been carefully checked by comparing spectroscopic ellipsometry and x-ray photoelectron spectroscopy measurements. These reference data have been used to inves...

Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization.

This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...

Spectroscopic ellipsometry of metal phthalocyanine thin films.

Optical functions of cobalt phthalocyanine, nickel phthalocyanine (NiPc), and iron phthalocyanine (FePc) have been determined by use of spectroscopic ellipsometry in the spectral range 1.55-4.1 eV (300-800 nm). The samples were prepared by evaporation onto glass and silicon substrates. The optical functions were determined by point-to-point fit. Absorption spectra were also measured. The index-...

Characterization of Nanocrystals Using Spectroscopic Ellipsometry

First applications of ellipsometry to the measurement of polyand nanocrystalline thin films date back to many decades. The most significant step towards the ellipsometric investigation of composite thin films was the realization of the first spectroscopic ellipsometers in the ’70s [3, 4, 8], which allowed the measurement of the dielectric function, the imaginary part of which is directly relate...

Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage